Safety guidelines for semiconductor manufacturing equipment (FPD manufacturing equipment)
SEMI are guidelines related to the design of semiconductor manufacturing equipment. Though they are guidelines (S26 contains guidelines for FPD manufacturing equipment), they have become mainstream throughout the semiconductor manufacturing equipment industry and cannot be overlooked when designing and producing semiconductor manufacturing equipment. For the requirements of each section of SEMI, we provide consulting regarding evaluation and conformity of our clients’ equipment, and can conduct the necessary testing when requested.
SEMI S2 are guidelines for the design of semiconductor manufacturing equipment. The requirements are standards that must be achieved for the environment, health, and safety (EHS: Environmental Health and Safety). Requirements of other guidelines are also referenced in accordance with the electrical, chemical, ergonomic design, and other special characteristics of the equipment.
SEMI S8 are requirements for the general rules and considerations that must be made to determine if equipment has been designed according to ergonomic engineering designs.
SEMI S6 lists evaluation methods regarding exhaust and ventilation of equipment using chemicals and solvents. A tracer gas test is performed to evaluate the exhaust performance to extract chemical substances which have leaked internally. In addition, a verification test for non-flammable atmospheres when flammable chemical substances are used is conducted, and a CIH test which evaluates the degree of exposure of chemical substances to workers is also performed.
SEMI S22 lists electrical testing methods as design standards related to the electrical design of equipment and methods of evaluating their conformity.
SEMI S23 lists design standards for reduction of energy consumption and energy efficiency, as well as methods of evaluating them, based on assumptions on the environmental considerations for the equipment.
SEMI S26 are guidelines for the design of FPD manufacturing equipment. The requirements are standards that must be met for environmental, health and safety (EHS ‒ Environmental Health and Safety) reasons. The requirements of other guidelines are also referenced in accordance with the electrical, chemical, ergonomic design, and other special characteristics of the equipment.
SEMI E33 lists evaluation and testing methods as design standards related to electromagnetic conformity and methods of confirmation.
SEMI E78 lists evaluation and testing methods as design standards related to electrostatic charge and methods of confirmation.
SEMI F47 lists methods of evaluation and testing to check to see if equipment malfunctions when the power voltage of plants becomes unstable. The tests cause input voltage to drop below a prescribed value and then check to see if normal operation conditions of the equipment are maintained without it stopping.
Major manufacturers of semiconductors and FPD in North America, Korea, Taiwan, and other areas have their own common safety specifications. Adding to the content of what SEMI requires, we conduct conformity evaluations and tests for those common safety standards, and as required, we will acquire certification from third-party certification organizations approved by the major semiconductor and FPD manufacturers.